Micro- and Nano-electromechanical Systems (MEMS and NEMS)
Mechanical and Aerospace Engineering
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Research Areas |
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Miniaturization science (MEMS and NEMS) with an emphasis on chemical and biological applications. Current projects include polymer actuators (for drug delivery), C-MEMS and CD based fluidics. Besides miniaturization techniques and materials choices, scaling laws are considered. |
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Prof.
Marc J. Madou |
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Design and advanced control of
micro-electromechanical systems (MEMS);
High-precision micro-machined gyroscopes; MEMS-enhanced optical
systems, tools, and prosthetic appliances; Electro- mechanical and
machine-information systems integration. |
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Prof.
Andrei M. Shkel |
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